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Energy dispersive X-ray spectroscopy (EDS) is an analytical technique for sample analysis and characterisation. Usually used together with scanning and transmission electron microscopes, it analyses the types and content of elements in a micro-area of the material: the characteristic X-rays generated when the electron beam interacts with matter provide information on the chemical composition of the sample, allowing qualitative and semi-quantitative detection of most elements (Be4 to Pu94) and analysis of surface contaminants.
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